Emission pattern of an aluminium nitride target for radio frequency magnetron sputtering

Structural and electrical properties of tantalum nitride thin films fabricated by using reactive radio-frequency magnetron sputtering

TaN thin film is an attractive interlayer as well as a diffusion barrier layer in [FeN/TaN]n multilayers for the application as potential write-head materials in high-density magnetic recording. We synthesized two series of TaN films on glass and Si substrates by using reactive radio-frequency sputtering under 5-mtorr Ar/N2 processing pressure with varied N2 partial pressure, and carried out sy...

Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. The films were characterized based on their che...

Deposition by radio frequency magnetron sputtering of GaV4S8 thin films for resistive random access memory application

The effect of alumina and aluminium nitride coating by reactive magnetron sputtering on the resin bond strength to zirconia core

PURPOSE Although several surface treatments have been recently investigated both under in vitro and in vivo conditions, controversy still exists regarding the selection of the most appropriate zirconia surface pre-treatment. The purpose of this study was to evaluate the effect of alumina (Al) and aluminium nitride (AlN) coating on the shear bond strength of adhesive resin cement to zirconia cor...

Decorative Titanium Nitride Colored Coatings on Bell-Metal by Reactive Cylindrical Magnetron Sputtering

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...